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First, the gas transmission pump Gas transmission pump is a gas can continue to inhale and discharge, in order to achieve the purpose of pumping the vacuum pump, the pump basically has two types:
1, variable capacity vacuum pump
Variable capacity vacuum pump is the use of cyclical changes in the volume of the pump to complete the process of inhalation and exhaust of a vacuum pump. The gas is compressed before being discharged. This pump is divided into reciprocating and rotary two:
â‘´ reciprocating vacuum pump: the use of reciprocating piston pump cavity, the gas inhalation, compression and discharge. Therefore, also known as piston vacuum pump.
⑵ rotary vacuum pump: the use of the pump cavity to make rotary motion piston, the gas inhalation, compression and discharge. Rotary vacuum pump has the following types:
â‘ oil seal vacuum pump: It is the use of oil seals the gap between the moving parts, reducing the harmful space of a rotating varactor vacuum pump. This pump is usually equipped with gas ballast, it is also known as gas-town vacuum pump. According to its structural characteristics are divided into the following five types.
a) Rotary vane vacuum pump: The rotor is installed in the pump casing with a certain eccentricity and is close to the fixed surface of the inner surface of the pump casing. Two (or more than two) rotary vanes are provided in the rotor groove. When the rotor rotates Slides reciprocate along their radial grooves and are always in contact with the inner wall of the pump housing. This vane rotates with the rotor to divide the pump chamber into several variable volumes.
b) Spool vacuum pump: a spool is mounted on the outside of the eccentric rotor, the rotor rotates to bring the spool to slide and roll along the inner wall of the pump housing, the spool rod on the upper part of the spool can slide in the swingable spool guide and the The pump chamber is divided into two variable volumes.
c) Fixed-disc vacuum pump: An eccentric rotor near the inner surface of the pump is installed in the pump housing. A radial vane always contacts with the rotor surface is provided on the pump housing. When the rotor rotates, the vane can slide up and down Divide the pump chamber into two variable volumes.
d) trochoidal vacuum pump: eccentric in the pump chamber is equipped with a trochoid trochanter rotor, which along the inner wall of the pump chamber rotation and the pump chamber is divided into two variable volume.
e) Multi-Chamber Rotary Vane Vacuum Pump: A rotary vane vacuum pump with multiple independent chambers driven by the same motor in parallel in a pump housing.
â‘¡ Dry vacuum pump: It is a non-oil (or liquid) sealed varactor vacuum pump.
â‘¢ liquid ring vacuum pump: rotor with multi-blade eccentric mounted in the pump housing, when it is rotating, the liquid (usually water or oil) thrown into the pump housing to form a concentric liquid ring, the liquid ring with the rotor blades Formed a few small volume changes in volume, it is also known as rotary varactor vacuum pump.
â‘£ Roots vacuum pump: pump equipped with two opposite directions synchronous rotation of the double-leaf or multi-lobed rotor, between the rotor, the rotor and the pump housing to maintain a certain gap between the inner wall. It belongs to the rotating vacuum pump. Mechanical booster pump is the type of vacuum pump.
2, momentum transfer pump
The pump relies on high-speed rotating blades or high-speed jets to deliver momentum to gas or gas molecules that continuously deliver gas from the pump's inlet to the outlet. Specific can be divided into the following types.
â‘´ molecular vacuum pump: It is the use of high-speed rotating rotor to transfer energy to gas molecules, so that compression, exhaust a vacuum pump. It has the following types:
â‘ traction molecular pump: gas molecules and high-speed rotor collision to obtain momentum, was sent to the exit, therefore, is a momentum transfer pump.
Turbomolecular pump: Pump equipped with a slotted disc or a vane rotor, which rotates between the stator disc (or stator). The linear velocity of the rotor circumference is high. Such pumps usually work in molecular flow conditions.
â‘¢ composite molecular pump: It is a combination of turbocharged and towed molecular pump in series a composite molecular vacuum pump.
(2) Jet vacuum pump: It is a kind of momentum transmission pump which delivers gas to the outlet by high-speed jet generated by pressure drop of Venturi effect and is suitable for working in viscous flow and transition flow state. This pump can be divided into the following details:
â‘ liquid jet vacuum pump: liquid (usually water) as the working medium jet vacuum pump.
â‘¡ gas jet vacuum pump: non-condensable gas as the working medium jet vacuum pump.
â‘¢ steam jet vacuum pump: to steam (water, oil or mercury vapor) as the working medium jet vacuum pump.
(3) diffusion pump: low-pressure high-speed steam flow (oil or mercury vapor) as the working medium jet vacuum pump. Gas molecules diffuse into the vapor jet and are sent to the outlet. The molecular gas density in the jet is always low, and this pump is suitable for operation in molecular flow conditions. It can be divided into:
â‘ self-purification diffusion pump: pump volatile impurities by mechanical transport to the export without returning to the boiler in an oil diffusion pump.
â‘¡ fractionation diffusion pump: This pump has a fractionation device, so that the vapor pressure of the lower working fluid vapor into the high vacuum nozzle work, and high vapor pressure of the working fluid vapor into the low vacuum nozzle work, it is a more Grade oil diffusion pump.
(4) diffusion jet pump: it is a proliferation of pump characteristics of single or multi-stage nozzle with jet vacuum pump features a single or multi-stage nozzle in series consisting of a momentum transfer pump. Oil booster pump that belongs to this type.
(5) ion transport pump: it is a gas that will be ionized gas in the electromagnetic field or the role of the electric field, delivered to the outlet of a momentum transfer pump.
Second, the gas trap pump This pump is a gas molecules are adsorbed or condensed on the pump's inner surface, thereby reducing the number of gas molecules in the container to achieve the purpose of pumping the vacuum pump, the following types.
1, adsorption pump It relies mainly on adsorption of large surface adsorbent (such as porous material) to absorb the physical adsorption of a trapping vacuum pump.
2, getter pump It is a use of getters to capture gases in a chemical combination of vacuum pumps. Getters are usually metals or alloys that exist in the form of lumps or deposited fresh films. Sublimation pump that belongs to this type.
3, getter ion pump
It is to make the ionized gas through the electromagnetic field or the role of electric field adsorption on the surface of the gettering material, in order to achieve the purpose of pumping. It has the following types.
(1) Evaporation Ion Pump: A vacuum pump in which ionized gas is adsorbed on a gettering material that sublimes (or evaporates) in an intermittent or continuous manner and covers an inner wall of the pump to effect aspiration.
(2) Sputtering Ion Pump: A vacuum pump in which the ionized gas is adsorbed on the getter material that is continuously sputtered by the cathode to achieve the purpose of pumping.
4, cryogenic pump use of low temperature surface capture gas vacuum pump.
According to the working principle of the vacuum pump classification
According to the working principle of vacuum pump, vacuum pump can basically be divided into two types, namely, gas transmission pump and gas trap pump. With the vacuum application technology in the field of production and scientific research on the pressure range of its application more and more wide, most of them need to be composed of several vacuum pump vacuum exhaust system together to meet the production and scientific research process requirements, therefore Selection of different types of vacuum pump composed of vacuum extraction unit more often. For the sake of convenience, it is necessary to classify these pumps in some specific detailed categories according to their working principle or their structural features. Now as follows: